Uncertainty of the X-ray Diffraction (XRD) sin2 ψ Technique in Measuring Residual Stresses of Physical Vapor Deposition (PVD) Hard Coatings
نویسندگان
چکیده
منابع مشابه
Technique in Measuring Residual Stresses of Physical Vapor Deposition (PVD) Hard Coatings
Residual stresses of physical vapor deposition (PVD) hard coatings can be measured using X-ray diffraction (XRD) methods under either conventional d-sin2 ψ mode or glancing incident (GIXRD) mode, in which substantial uncertainties exist depending on the applied diffraction parameters. This paper reports systematic research on the effect of the two analytical modes, as well as the anisotropic el...
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ژورنال
عنوان ژورنال: Coatings
سال: 2017
ISSN: 2079-6412
DOI: 10.3390/coatings7080128